Encapsulated ball bearings for rotary micro machines
نویسندگان
چکیده
We report on the first encapsulated rotary ball bearing mechanism using silicon microfabrication and stainless steel balls. The method of capturing stainless steel balls within a silicon race to support a silicon rotor both axially and radially is developed for rotary micro machines and MEMS ball bearing tribology studies. Initial demonstrations show speeds up to 6.8 krpm without lubrication, while speeds up to 15.6 krpm with lubrication are possible. Qualitative analysis is used to explain start-up behavior and investigate the wear of the stainless steel ball and silicon race. (Some figures in this article are in colour only in the electronic version)
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